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A PROCESS FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES COMPRISING THE CHEMICAL MECHANICAL POLISHING OF ELEMENTAL GERMANIUM AND/OR SI1 XGEX MATERIAL IN THE PRESENCE OF A CMP COMPOSITION COMPRISING A SPECIFIC ORGANIC COMPOUND
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Abstract
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A PROCESS FOR THE MANUFACTURE OF SEMICONDUCTOR DEVICES COMPRISING THE CHEMICAL MECHANICAL POLISHING OF ELEMENTAL GERMANIUM AND/OR SI1 XGEX MATERIAL IN THE PRESENCE OF A CMP COMPOSITION COMPRISING A SPECIFIC ORGANIC COMPOUND
PCT NATIONAL PHASE APPLICATION
Published
Filed on 28 February 2014
Patent Information
| Application ID | 1604/CHENP/2014 |
| Date of Application | 28/02/2014 |
Documents
| Name | Date |
|---|---|
| 1604-CHENP-2014-RELEVANT DOCUMENTS [31-10-2017(online)].pdf | 31/10/2017 |
| Form 3 [19-04-2017(online)].pdf | 19/04/2017 |
| Form 3 [11-11-2016(online)].pdf | 11/11/2016 |
| Form 3 [14-07-2016(online)].pdf | 14/07/2016 |
| 1604-CHENP-2014 CORRESPONDENCE OTHERS 23-04-2015.pdf | 23/04/2015 |
| 1604-CHENP-2014 FORM-3 23-04-2015.pdf | 23/04/2015 |
| 1604-CHENP-2014 FORM-3 27-11-2014.pdf | 27/11/2014 |
| 1604-CHENP-2014 CORRESPONDENCE OTHERS 27-11-2014.pdf | 27/11/2014 |
| 1604-CHENP-2014 CORRESPONDENCE OTHERS 21-07-2014.pdf | 21/07/2014 |
| 1604-CHENP-2014 FORM-3 21-07-2014.pdf | 21/07/2014 |
| Amended Form 1, 5.pdf | 03/07/2014 |
| Clean copy of claims.pdf | 03/07/2014 |
| Marked up copy of claims.pdf | 03/07/2014 |
| PD011908IN-NP_Form 13 (Address of inventor.pdf | 03/07/2014 |
| PD011908IN-NP_Form 13 (Claim amendments).pdf | 03/07/2014 |
| 1604-CHENP-2014 FORM-13 01-07-2014.pdf | 01/07/2014 |
