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A NOVEL ABRASIVE FREE CHEMICAL MECHANICAL PLANARIZATION (AFCMP) OF NON-POLAR AND SEMI POLAR III-V NITRIDE SURFACES
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Abstract
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A NOVEL ABRASIVE FREE CHEMICAL MECHANICAL PLANARIZATION (AFCMP) OF NON-POLAR AND SEMI POLAR III-V NITRIDE SURFACES
ORDINARY APPLICATION
Published
Filed on 1 August 2013
Patent Information
| Application ID | 3471/CHE/2013 |
| Date of Application | 01/08/2013 |
Documents
| Name | Date |
|---|---|
| 3471-CHE-2013-IntimationOfGrant09-05-2022.pdf | 09/05/2022 |
| 3471-CHE-2013-PatentCertificate09-05-2022.pdf | 09/05/2022 |
| 3471-CHE-2013-PETITION UNDER RULE 137 [02-05-2022(online)].pdf | 02/05/2022 |
| 3471-CHE-2013-Response to office action [21-03-2022(online)].pdf | 21/03/2022 |
| 3471-CHE-2013-FORM 13 [16-03-2022(online)].pdf | 16/03/2022 |
| 3471-CHE-2013-RELEVANT DOCUMENTS [16-03-2022(online)].pdf | 16/03/2022 |
| 3471-CHE-2013-Written submissions and relevant documents [16-03-2022(online)].pdf | 16/03/2022 |
| 3471-CHE-2013-Correspondence to notify the Controller [26-02-2022(online)].pdf | 26/02/2022 |
| 3471-CHE-2013-US(14)-ExtendedHearingNotice-(HearingDate-01-03-2022).pdf | 16/02/2022 |
| 3471-CHE-2013-Written submissions and relevant documents [29-12-2021(online)].pdf | 29/12/2021 |
| 3471-CHE-2013-Correspondence to notify the Controller [13-12-2021(online)].pdf | 13/12/2021 |
| 3471-CHE-2013-US(14)-HearingNotice-(HearingDate-14-12-2021).pdf | 26/11/2021 |
| 3471-CHE-2013-FER_SER_REPLY [11-01-2021(online)].pdf | 11/01/2021 |
| 3471-CHE-2013-OTHERS [11-01-2021(online)].pdf | 11/01/2021 |
| 3471-CHE-2013-FER.pdf | 10/07/2020 |
| Form 18 [24-03-2017(online)].pdf | 24/03/2017 |
| abstract3471-CHE-2014.jpg | 22/12/2014 |
| FORM 13 - change of address for service.pdf | 01/08/2014 |
| POA.pdf | 01/08/2014 |
| 3471-CHE-2013 CORRESPONDENCE OTHERS 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 POWER OF ATTORNEY 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 ABSTRACT 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 CLAIMS 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 CORRESPONDENCE OTHERS 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 DESCRIPTION(COMPLETE) 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 DRAWINGS 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 FORM-2 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 FORM-5 25-07-2014.pdf | 25/07/2014 |
| 3471-CHE-2013 FORM-13 24-07-2014.pdf | 24/07/2014 |
| 3471-CHE-2013 CORRESPONDENCE OTHERS 01-08-2013.pdf | 01/08/2013 |
| 3471-CHE-2013 DSECRIPTION (PROVISIONAL) 01-08-2013.pdf | 01/08/2013 |
| 3471-CHE-2013 FORM-1 01-08-2013.pdf | 01/08/2013 |
| 3471-CHE-2013 FORM-2 01-08-2013.pdf | 01/08/2013 |
| 3471-CHE-2013 POWER OF ATTORNEY 01-08-2013.pdf | 01/08/2013 |
