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“A J.E PROBE ASSEMBLY FOR MEASURING POWER DEPOSITION IN A RADIO FREQUENCY (RF) PLASMA AND A METHOD THEREOF”
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Abstract
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Inventors
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“A J.E PROBE ASSEMBLY FOR MEASURING POWER DEPOSITION IN A RADIO FREQUENCY (RF) PLASMA AND A METHOD THEREOF”
ORDINARY APPLICATION
Published
Filed on 22 January 2021
Patent Information
| Application ID | 202111003158 |
| Date of Application | 22/01/2021 |
Documents
| Name | Date |
|---|---|
| 202111003158-ABSTRACT [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-CLAIMS [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-COMPLETE SPECIFICATION [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-DRAWING [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-FER_SER_REPLY [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-FORM-8 [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-OTHERS [01-09-2023(online)].pdf | 01/09/2023 |
| 202111003158-FER.pdf | 03/03/2023 |
| 202111003158-Proof of Right [20-07-2022(online)].pdf | 20/07/2022 |
| 202111003158-COMPLETE SPECIFICATION [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-DECLARATION OF INVENTORSHIP (FORM 5) [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-DRAWINGS [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-FORM 1 [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-FORM 18 [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-POWER OF AUTHORITY [22-01-2021(online)].pdf | 22/01/2021 |
| 202111003158-REQUEST FOR EXAMINATION (FORM-18) [22-01-2021(online)].pdf | 22/01/2021 |
